D700T

D700T is the best performance pressure-insensitive mass flow module designed for critical semiconductor manufacturing process. D700T adapted the HORIBA CRITERION pressure-based flow measure and control technology to provide industry leading repeatable and accurate performance. In addition, uniqueness of D700T is utilizing a patented advanced flow control algorithm with twin valve structure which enables customer's gas delivery system to solve multiple challenges.

FEATURES

• ≤ 100 msec fast settling time across-the-board (Set to Set, Step up and Step down)
• Inlet and outlet pressure insensitive performance
• Advanced failure detection to diagnose pressure sensor shift, valve seat leak and flow accuracy change
• Within 0.15 %S.P. repeatability
• Best accuracy specification is within 0.45 %S.P.* (Standard: 0.8 %S.P.)
• Wider Operating Temperature Range (15-60 °C)
   

*Note: D700T is single gas configuration. Ask Horiba for specification.