VG-200S
Absolute pressure measurement is crucial for most of vacuum processes in various industries including Semiconductor, FPD, HDD, PV and Coating. A capacitance manometer determines the total pressure from the deformation of the diaphragm that occurs when a pressure difference is applied to both side of the diaphragm. The strong points of the capacitance manometer over other methods are:
•Higher precision
•Less gas dependence in pressure output
•Relatively resistant to corrosive gases
FEATURES
- Compact self heating design
- Original signal processing method for accurate measurement
- SUS316L diaphragm
- Selectable from temperature-controlled (55, 100°C) or non-heating type
- ONE PUSH ReZero
- Power requirements +/-15VDC or 24VDC
- CE & RoHS compliant
SPECIFICATIONS
| Model | VG-211S | VG-221S | ||
| F.S. measurement range | 133.32 Pa (A) | 1.3332kPa (A), 13.332kPa (A), 133.32kPa (A) | 133.32Pa (A) | 1.3332kPa (A), 13.332kPa (A), 133.32kPa (A) |
| Sensor temperature *1 | Amb. (25°C) | 55℃ / 100°C | ||
| Accuracy *2 | 0.5% R.S. | 0.25% R.S. | 0.5% R.S. | 0.25% R.S. |
| Resolution | 0.03% F.S. | 0.01% F.S. | 0.03% F.S. | 0.01% F.S. |
| Zero temperature coefficient | 0.01% F.S./°C | 0.005% F.S./°C | 0.005% F.S. /°C | 0.0025% F.S. /°C |
| Span temperature coefficient | 0.05% R.S./°C | 0.03% R.S./°C | 0.03% R.S. /°C | 0.02% R.S. /°C |
| Response time | < 60msec | |||
| Operating temperatue *3 | 10-50°C | |||
| Wetted materials | SUS316L | |||
| Pressurization limit | 300kPA (A) | 350kPa (A) | 300kPa (A) | 350kPa (A) |
| Output signal | 0-10VDC Load resistance: 10kΩ or more | |||
| I/O connector | D-Sub 15pin | |||
| Power supply voltage | +15VDC±5％、0.1A max. -15VDC±5％、0.1A max | +15VDC±5%, 0.6Amax. -15VDC±5%, 0.6Amax. | ||
| 24VDC±5%, 2.4W max. | 24VDC±5%, 22W max. | |||
| warm-up time | 15 minutes | 60 minutes (55°C temp. control type) 120 minutes (100°C temp. control type) |
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| Open collector output | Rated voltage: 30V Rated current: 50mA | |||
| Re-Zero input *4 | Now-voltage contact input Contact open voltage: 13V Maximum contact current: 1.3mA | |||
| Standard fitting *5 | KF16, 1/2 inch VCR Female, ICF34, 1/4 inch VCR Female | |||
